Shanghai Prosrun Technology Co., Ltd.

Add : 22K Huamin Hanzun,
NO.726 Yan'an West
Road, Changning
District, Shanghai.

Tex : +86 21 5821 0030

Fax : +86 21 5821 0030

E-mail : info@yoshi.co.jp

Wafer Fabrication > Thermal Processing

【KOYO】VCSEL Wet Oxidation Furnace

Used for VCSEL wet oxygen oxidation process, mass production equipment, can process 25 pieces at a time

Process acceptance criteria