Shanghai prosrun Technology Co., Ltd.

Add : 7C Huamin Hanzun,
       NO.726 Yan'an West
       Road, Changning
       District, Shanghai.

Tex : (86)21-5821-0030

Fax : (86)21-5860-0110

E-mail : info@yoshi.co.jp


Semiconductor Materials > Measuring equipment
6/8/12 inch silicon wafer edge polishing machine

This equipment is an equipment for ultra-precision polishing of the edge of the silicon wafer (notch VN or reference surface OF) by pressing the peripheral edge of the 6/8 inch (150mm/200mm) silicon wafer with a polishing cloth. (Note: V-NOTCH is abbreviated as VN, which means gap; FLAT is abbreviated as OF, which means reference surface)

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